Proceeding of MEMS'93
A Micromachined Comb Drive Tuning Fork Gyroscope
Bernstein, J.(et al.)
Proceedings of MEMS'95
A Micromachined Vibrating Gyroscope
Tanaka, K.(et al.)
Sensors and Actuators
v.A64
Laterally Oscillated and Force-Balanced Micro Vibratory Rate Gyroscope Supported by Fish-Hook-Shaped Springs
Park, K. Y.;Lee, C. W.;Oh, Y. S.;Cho, Y. H.
Technical Digest of the 16th Sensor Symposium
Vibratory Rate Gyroscope with Lateral Movement for Driving and Sensing using SOI Substrate
Kawai, H.;Shibano, T.;Moriya, K.;Kobayashi, S.;Ohwada, K.
Transducer 99
Sliicon Angular Rate Sensor for Automotive Applications with Piezoelectric Readout
Sassen, S.;Voss, R.(et al.)