Ozone Density Estimation and Stable Supply in the Thin Film Growth

An ozone condensation system is evaluated from the viewpoint of an ozone supplier for Bi-superconductor thin film growth. An ozone condenser by a selective adsorption on the silica gel surface is constructed. Ozone density is evaluated by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the density evaluation from dilute to highly condensed ozone. The highest ozone density condensed by the adsorption method is evaluated to be 97 mol%.