참고문헌
- Science v.245 Prediction of New Low compressibility A. Y. Liu;M. L. Cohen
- Thin Solid Films v.302 Carbon nitride CNx film deposition assisted by IR laser ablation in a cold remote nitrogen plasma C. Jama;V. Rousseau;O. Dessaux;P. Goudmand
- Ph.D. Thesis: Preparation of crystalline carbon nitride thin film and bulk sample J. I. Kim
- Mendeleev Commun v.6 no.10 Synthesis of crystalline carbon nitride K. P. Burdina;N. B. Zorov;O. V. Kravchenko;Y. Y. Kuzyakov;J. I. Kim;S. A. Kulinich
- J. Vac. Sci. Technol. v.A13 Ionized magnetron sputter deposition of amorphous carbon nitride thin films D. Li;S. Lopez;Y. W. Chung;M. S. Wong;W. D. Sproul
- Jpn. J. Appl. Phys. v.32 no.10A Structural Properties of Amorphous Carbon Nitride Films Prepared by Reactive RF-magnetron Sputtering N. Nakayama;Y. Tsuchiya;S. Tamada;K. Kosuge;S. Nagada;K. Takahiro;S. Yamaguchi
- Phys. Rev. Lett. v.73 no.1 Carbon nitride deposited using energetic species: A tow-phase system D. Marton;K. J. Boyd;A. H. Al-Bayati;S. S. Todorov;J. W. Ravalais
-
J. Phys.: Conden. Matt.
v.6
Carbon nitride films synthesized by
$NH_3$ -ion-beam-assisted H. W. Song;F. Z. Cui;X. M. He;W. Z. Li;H. D. Li - J. Appl. Phys. v.76 no.7 Elemental composition and microstructure of reactively sputtered carbon nitride thin films S. Kumar;T. L. Tansley
- Thin Solid Films v.303 Si-containing crystalline carbon nitride derived from microwave plasma-enhanced chemical vapor deposition L. C. Chen;D. M. Bhusan;C. Y. Yang;K. H. Chen;T. J. Chuang;M. C. Lin;C. K. Chen;Y. F. Huang
- Appl. Phys. v.A65 Preparation of carbon nitride film powder by laser induced gas-phase reaction R. Alexandrescu;F. Huisken;A. Crunteanu;S. Petcu;S. Cojocaru;S. Cireasa;I. Morjan
- Appl. Phys. Lett. v.65 no.6 Formation of carbon nitride films on Si(100) substrates by electron cyclotron resonance plasma assisted vapor deposition A. Bousetta;M. Lu;A. Bensaoula;A. Schultz
- Phys. Rev. B v.51 no.8 Carbon nitride films sythesized by combined ion-beam and laser-ablation processing Z. M. Ren;Y. C. Du;Y. Qiu;J. D. Wu;Z. F. Ying;X. X. Xiong;F. M. Li
- Thin Solid Films v.308;309 Preparation of carbon nitride thin films by ion beam assisted deposition and their mecanical properties M. Kohzaki;A. Matsumuro;T. Hayashi;M. Muramatsu;K. Yamaguch
- Appl. Phys. Lett. v.68 no.9 Characteristics of carbon nitride films synthesized by single-source ion beam enhanced deposition system Z. Wu;Y. Yu;X. Liu
- J. Vac. Sci. Technol.A v.15 no.1 Synthensis of carbon nitride films at low temperature P. Harmmer;M. A. Baker;C. Lenardi;W. Gissler
- Jpn. J. Appl. Phys. v.36 no.8 Hydrogenated carbon nitride thin films deposited by the plasma chemical vapor deposition technique using trimethylamine and ammoina S. Kobayashi;S. Nozaki;H. Morisaki;S. Masaki
-
J. Vac. Sci. Technol. A
v.14
no.3
Nitrogen-ion irradiation during the deposition of
$C_{1_x}N_x$ thin films by ion beam sputtering technique S. Kobayashi;K. Miyazaki;S. Nozaki;H. Morisaki -
Thin Solid Films
v.308;309
Reactive magnetron sputtering of
$CN_x$ thin films at different substrate bias W. T. Zheng;E. Broitman;N. Hellgren;K. Z. Xing;I. Ivanov;H. Sjostrom;J. E. Sundgren - J. Appl. Phys. v.76 no.6 Properties of carbon nitride films with composition ratio C/N=0.5-3.0 prepared by the ion and vapor deposition method K. Ogata;J. F. D. Chubaci;F. Fujimoto
- Science in China v.41 no.4 Synthesis of C3N4 crystals under high pressure and high temperature D. He;F. Zhang;X. Zhang;M. Zhang;R. Liu;Y. Xu;W. Wang
- Appl. Phys. Lett. v.68 no.5 Crystalline carbon nitride films formation by chemical vapor deposition Y. Zhang;Z. Zhou;H. Li
- Science v.271 Low compressibity carbon nitride M. L. Teter;R. H. Hemley