참고문헌
- Sensors & Actuators A. v.41 Sputtered silicon thin-film for piezoresistive pressure microsensors I. Obieta;F. J. Gracia
- Sensors & Actuators A. v.25-27 A planar thick-film load cell N. M. White;J. E. Brignell
- IEEE J. Solid-State Circuit v.SC-22 CMOS integrated silicon pressure sensor T. Ishihara;K. Suzaki;S. Suwazono;M. Hirata;H. Tanigawa
- Sensors & Actuators A. v.39 Thin SOI structures for sensing and integrated circuit applications G. S. Chung
- Semiconductor Technology v.4 High reliability SOS pressure sensor Q. Chen;R. Shi;Z. Teng;H. Xu
- Sensors & Actuators A. v.28 Piezoresistive pressure sensors based on polycrystalline silicon V. Mosser;J. Suski;J.Goss
- IEEE TRans. Electron Devices v.40 Pressure trasducer with Au-Ni thin-film strain gauges K. Rajanna;S. Mohan;M. M. Nayak;N. Gunasekaran;A. E. Muthunayagam
- Sensors & Actuators A. v.24 Thin-film pressure trasducer with manganese film as the strain gauge K. Rajanna;S. Mohan
- Sensors & Actuators A. v.35 Ion-beam sputtered thin-film Strain gauge pressure transducers W. Hongye;L. Kun;A. Zhichou;W. Xu;H. Xun
- Thin-Solid Films v.137 Behaviour of Bi-Sb alloy thin-film as strain gauges S. Sampath;K. V. Ramanaiah
- Tech. Dig. of the 9th Sensor Symposium Constantan thin-film strain gauge load cell H. Konishi;T. Suzuki;M. Utsunomiya
- Pro. of the KIEEME Annual Autumn Conference Fabrication and characteristics of chronium thin-film strain gauges J. H. Kim;G. S. Chung
- Trans. KIEE v.47 Effects of pyrazine on TMAH/IPA silicon anisotropic etching characteristics G. S. Chung;C. S. Park
- Sensors & Actuators v.46-47 A CAD environment for the numerical simulation of integrated pezoresistive transducers P. Ciampolini;A. Pierantoni;M. Rudan
- Pro. of the KIEEME Annual Summer Conference Annealing characteristics of chronium thin-film strain gauges K. D. Kang;G. S. Chung
- J. KIEEME v.12 Study on micro-drilling of #7740 glass substrates by electrochemical discharge machining G. S. Chung;S. W. Hong
- IEEE Trans. Electron Devices v.ED-34 Scaling limits in batch-fabricated silicon pressure sensors H. L. Chau;K. D. wise
- Sensors & Actuators A. v.23 Piezoresistive low-pressure sensor with high sensitivity and high accuracy H. Sandmaier;K. Kuhl
- Jpn. J. Appl,. Phys. v.28 Second-order piezoresistance coefficients of the n-type silicon K. Matsuda;Y. Kanda;K. Yamamura;K. Suzaki