Abstract
This dissertation describes the development of a sensor for measuring microscopic displacement where we use CoFeSiB amorphous alloy magnetic ribbon having near zero magnetostrictive properties. For the development of the sensor, we first fabricate amorphous alloy magnetic ribbon, and then investigate its physical and magnetic properties. Finally, its possibility of practical application as a displacement sensor is discussed. The experimental samples were made of near zero magnetostrictive (Co$\_$0.94/Fe$\_$0.06/)$\_$9/Si$_2$B$\_$19/ alloy which were fabricated by a rapid liquid quenching method. As a results, we got amorphous alloy magnetic ribbons of 12㎛ in thickness, 10 mm in length, and 2.5 m in width. It was found that the crystallization temperature and the Curie temperature are around 451$\^{C}$ and around 441$\^{C}$ respectively. We couldn't observe any noticeable change of the impedance frequency of 10MHz, but observed the impedance change of 3.76 %/Oe at 100 MHz. The inductance was nearly stable over the frequency range of 1∼10 MHz, In addition, it was observed that the variation of the inductance and the impedance were linear within the displacement ranges of 20∼60㎛. As the results of the experiments, it is suggested that the displacement sensor which is fabricated by using amorphous alloy magnetic ribbon of (Co$\_$0.04/Fe$\_$0.06/)$\_$79/Si$_2$B$\_$19/ compound, can be used as a sensor to detect microscopic displacement.