References
- Sensor & Actuators A v.31 Sensor Technology Stategy in Silicon P. M. Sarro
- Sensor & Actuators A v.49 Application of Thermal Si Sensors on Membranes M. A. Gajda(et. al.)
- Trans. Eurosensors. Ⅸ v.130-C2 A Microsensor with Integrated Heat Sink and Flow Guide for Gas Flow Sensing Application L. Qiu(et. al.)
- IEEE Electron Device Letters v.13 no.2 Micromachined Thermal Radiation Emittr from a Commercial CMOS Prosess M. Parameswaran(et. al.)
- IEEE Trans. on Electron Devices v.39 no.6 An Integrated Mass Flow Sensor with One-chip CMOS Interface Ciruitry E. Yoon(et. al.)
- Sensor & Actuators B v.26-27 Interated Array Sensors for Detection Organic Solvants J. W. Garderer(et. al.)
- Sensor & Actuators B v.2 A Substrate for Thin-film Gas Sensors in Microelectronic Technology U. Dibbern
- 7th Conf. on Sensor Technology Microtechnology and Equipment for Manufacturing SiC-based Sensor of Physical Values for Exterm Operation Conditions V. V. Luchinin
- Sensor & Actuators B v.2 A Substrate for Thin-film Gas Sensor in Microelectrocnic Technology U. Dibbern
- Trans. Eurosensors. Ⅸ v.57 no.PA6 Basic Micro-module for Chemical Sensor with One-chip Heater Buried Sensor Structure D. Mutschall(et. al.)
- J. Korean Sensors Society v.5 no.5 A Thermal Properties of Microhot Plate and the Characteristics of Pt/Cr Bilayers due to Annealing Temperature S. H. Lee(et. al.)
- Sensors & Materials v.10 no.5 The Fabrication of Pt Microheater Using Aluminum Oxide as Medium Layer and It's Characteristics G. S. Chung(et. al.)
- J. KIEEME v.13 no.6 The Fabrication of Pt Thin-film Type Microheater for Micro Thermal Sensors and Its Characteristics G. S. Chung(et. al.)
- Sensors & Materials v.12 no.3 Anisotropic Etching Characteristics of Silicon in TMAH:IPA:Pyrazine Solutions G. S. Chung(et. al.)
- J. Korean Sensors Society v.9 no.3 the Fabrication and Characteristics of RTD's for Micro Thermal Sensors G. S. Chung(et. al.)
- J. KIEEME v.9 no.9 Deposition of Pt Thin-Films for RTD G. S. Chung(et. al.)
- J. Korean Sensors Society v.6 no.2 Characteristics of Pt Thin-film RTD with Annealing Conditions G. S. Chung(et. al.)