한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제38권4호
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  • Pages.370-379
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  • 2001
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
권호 표지

PLD 기법으로 제조된 ${La_{0.67}}{A_{0.33}}{MnO_{3-\$delta}}$ (A=Ca, Sr, Ba) 박막의 결정구조 및 전기전도 특성

Crystalline Structure and Electrical Transport Characteristics of ${La_{0.67}}{A_{0.33}}{MnO_{3-\$delta}}$ (A=Ca, Sr, Ba) Thin Films Prepared by PLD Techniques

  • 조남희 (인하대학교 재료공학부) ;
  • 임세주 (인하대학교 재료공학부) ;
  • 성건용 (한국전자통신연구원 원천기술연구부)
  • 발행 : 2001.04.01
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초록

PLD(pulsed laser deposition) 기법을 이용하여 LaAl $O_3$(100) 기판 위에 L $a_{0.67}$ $A_{0.33}$Mn $O_{3-{\delta}}$ (A=Ca, Sr, Ba) 에피 박막을 성장하였다. 박막의 격자 상수 및 스트레인 상태는 GID(grazing incidence X-ray diffraction)법과 투과 전자 현미경 법을 이용하여 조사하였다. 박막의 <001> 방향은 기판 표면의 수직방향에 평행하게 놓였으며, 박막의 단위포는 기판과의 격자 불일치에 기인하여 a/c=0.98인 의사-정방정 페롭스카이트(pseudo-tetragonal perovskite) 구조를 가졌다. A 자리의 양이온 반경이 증가함에 따라 단위포의 체적, $\varepsilon$$^{∥}$, 그리고 $\varepsilon$$_{⊥}$이 각각 증가하였다. L $a_{0.67}$ $A_{0.33}$Mn $O_{3-{\delta}}$ (A=Ca, Sr, Ba) 박막의 온도 및 자장에 따른 전기 전도 특성 MR(%), Tc, $T_{MI}$ 들을 조사하였으며, 이 결과들을 박막의 구조적 특성과 상관하여 고찰하였다.여 고찰하였다.

키워드

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