한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제38권3호
  • /
  • Pages.218-224
  • /
  • 2001
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  • 1229-7801(pISSN)
  • /
  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
권호 표지

Temperature Dependence of the Deposition Behavior of Yttria-stabilized Zirconia CVD Films: Approach by Charged Cluster Model

  • Hwang, Nong-Moon (Korea Research Institute of Standards and Science) ;
  • Jeon, In-Deok (Center for Microstructure Science of Materials, School Mater. Sci. & Eng. Seoul National University) ;
  • Latifa Gueroudji (Korea Research Institute of Standards and Science) ;
  • Kim, Doh-Yeon (Center for Microstructure Science of Materials, School Mater. Sci. & Eng. Seoul National University)
  • 발행 : 2001.03.01
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초록

Yttria-stabilized zirconia (YSZ) films were deposited with varying temperatures of ZrCl$_4$between 250~55$0^{\circ}C$ with YCl$_3$and the substrate at 100$0^{\circ}C$. Nanoamperes per square centimeter of the electric current were measured in the reactor during deposition and the current increased with increasing evaporation temperature of ZrCl$_4$. The zirconia nanometer size clusters were captured on the grid membrane near the substrate during the CVD process and observed by transmission electron microscopy (TEM). The deposition rate decreased with increasing evaporation temperature of ZrCl$_4$. A cauliflower-shaped structure was developed at 25$0^{\circ}C$ then gradually changed to a faceted-grain structure above 35$0^{\circ}C$. Dependence of the growth rate and the morphological evolution on the evaporation temperature of ZrCl$_4$was approached by the charged cluster model.

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