한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제18권5호
  • /
  • Pages.50-56
  • /
  • 2001
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

전해 프로세스에 의한 미세축 가공시 형상 및 직경 제어

Shape and Diameter Control of Microshafts in Electrochemical Process

  • 임영모 (한국과학기술연구원 마이크로시스템연구센터) ;
  • 임형준 (한국과학기술원 기계공학과) ;
  • 김수현 (한국과학기술원 기계공학과)
  • Lim, Yung-Mo (Micro System Research Center, Korea Institute of Science and Technology) ;
  • Lim, Hyung-Jun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 발행 : 2001.05.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Fabrication methods are shown to produce slender and cylindrical tungsten shafts by electrochemical etching. The shape of microshatf formed by electrochemical etching is determined by the combination of two conflicting factors, i.e., initial shape and diffusion layer. We can obtain a desirable shaft profile by adjusting the thickness gradient of diffusion layer. The diameter of microshaft is controlled by mathematical model based on relation between process parameters and diameter.

키워드

참고문헌

  1. Y. Yamagata, T. Higuchi, ' Three-Dimensional Micro Fabrication by Precision Cutting Technique,' JSPE, Vol. 61, No. 10, pp. 1361-1364, 1995
  2. T. Waida, K. Okano, 'Micro-grinding of Micromachin Component,' JSPE, Vol. 61, No. 10, pp. 1365-1368, 1995
  3. T. Masuzawa, M. fujino, K. kobayashi, 'Wire Electro-Discharge Grinding for Micro Machining,' Annals of the CIRP, Vol. 34, No. , pp. 431-424, 1985
  4. M. Fotino, 'Nanotips by reverse electrochemical etching,' Appl. Phys. Lett., Vol. 60, No. 23, pp. 2935-2937, 1992 https://doi.org/10.1063/1.107468
  5. M. Fotino, 'Tip sharpening by normal and reverse electrochemical etching,' Rev. Sci. Instrum, Vol. 64, No. 1, pp. 159-167, 1993 https://doi.org/10.1063/1.1144419
  6. P. J. Bryant, H. S. Kim, Y. C. Zheng and R. Yang, 'Technique for sharping scanning tunneling microscope tips,' Rev. Sci. Instrum., Vol. 58, No. 6, pp. 1115, 1987 https://doi.org/10.1063/1.1139618
  7. H. Morikawa, K. Goto, 'Reproducible sharp-pointed tip preparation for field ion microschopy by controlled as polishing,' Rev. Sci. Instrum., Vol. 59, No. 10, pp. 2195-2197, 1988 https://doi.org/10.1063/1.1139985
  8. J. A. McGeough, 'Principles of electrochemical machining,' Chapman and Hall Ltd., 1974