Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Shape and Diameter Control of Microshafts in Electrochemical Process

전해 프로세스에 의한 미세축 가공시 형상 및 직경 제어

  • Lim, Yung-Mo (Micro System Research Center, Korea Institute of Science and Technology) ;
  • Lim, Hyung-Jun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 임영모 (한국과학기술연구원 마이크로시스템연구센터) ;
  • 임형준 (한국과학기술원 기계공학과) ;
  • 김수현 (한국과학기술원 기계공학과)
  • Published : 2001.05.01
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Abstract

Fabrication methods are shown to produce slender and cylindrical tungsten shafts by electrochemical etching. The shape of microshatf formed by electrochemical etching is determined by the combination of two conflicting factors, i.e., initial shape and diffusion layer. We can obtain a desirable shaft profile by adjusting the thickness gradient of diffusion layer. The diameter of microshaft is controlled by mathematical model based on relation between process parameters and diameter.

Keywords

References

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