초록
In micro automation technology, the concurrent realization of a high resolution and a large operating rage has been achieved by a dual actuator, usually called by piggy-back system, conventionally. But, because of its manufacturing cost, the complexity of control, and the limit of overall bandwidth, the contract-free and single servo actuators have been suggested with specific applications. In this paper, we suggest a novel non-contact surface actuator suing combination of the Lorentz force and the magnetized force, and discuss the actuating principles including an analytical approach. Differently from the existing planar system, an operating range of the suggested system can be expanded by an additional attachment of active elements. Therefore, it is estimated to be suitable for the next-generation moving system.
