International Journal of Precision Engineering and Manufacturing

  • 제2권2호
  • /
  • Pages.11-16
  • /
  • 2001
  • /
  • 2234-7593(pISSN)
  • /
  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

A New Calibration Method of Atomic Force Microscopy

  • Hyunkyu Kweon (School of Mechanical Engineering, Kumoh National University of Technology, Kyunbuk)
  • 발행 : 2001.07.01
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초록

This paper presents an in self-calibration method to corrent the Z-directional distortion of AFM(Atomic Force Microscopy).

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