International Journal of Precision Engineering and Manufacturing
- Volume 2 Issue 2
- /
- Pages.11-16
- /
- 2001
- /
- 2234-7593(pISSN)
- /
- 2005-4602(eISSN)
A New Calibration Method of Atomic Force Microscopy
- Hyunkyu Kweon (School of Mechanical Engineering, Kumoh National University of Technology, Kyunbuk)
- Published : 2001.07.01
Abstract
This paper presents an in self-calibration method to corrent the Z-directional distortion of AFM(Atomic Force Microscopy).
Keywords
- Calibration;
- Atomic Force Microscopy;
- PZT actuator;
- Z-directional distortion non-linear motion of the servo PZT of the AFM.