Characteristics of The 1-3 Piezoelectric Composite Transducer Manufactured by Dicing-Filling Method

Dicing-Filling 방법으로 제작된 1-3 압전복합변환자의 특성

The 1-3 piezoelectric composite transducer with 75 volume percents PZT was fabricated by the dicing-filling method. The resonance modes of the 1-3 transducer have been studied with electric impedance measurement as a function of frequency. The fundamental frequencies of the planar and thickness mode were observed at 0.95MHz and 1.63MHz respectively, but the lateral mode was not observed. In the thickness mode, the electromechanical coupling coefficient of the 1-3 piezoelectric composite transducer, 0.54, was very closed to that of the single phase PZT(0.52). The pulse-echo response by exciting the 1-3 transducer with an electric pulse was observed from the water/reflector interface, and analyzed bandwidth by the spectrum of the impulse response. The quality factor Q for the 1-3 transducer was observed as 1.5 smaller than that of the single phase(80) and then the 1-3 transducer may be used to the broad band type transducer applications.

압전 세라믹 PZT와 고분자 매질인 에폭시 수지를 사용하여 PZT 체적비가 75%인 1-3 압전복합변환자를 dicing-filling 방법으로 제작하여 임피던스 분석과 펄스 반사법으로 수신된 초음파신호의 스펙트럼 분석을 통하여 전기 및 음향 특성을 조사하였다. 제작된 1-3 압전복합변환자의 경진동 모드 및 두께진동 모드의 기본진동수는 각각 0.95MHz와 1.63MHz이었고, 측면진동 모드는 관찰되지 않았다. 두께진동 모드에 대한 전기기계 결합계수는 PZT 단일상(0.52)보다 큰 0.54로 수신효율이 향상되었음을 알 수 있었다. 그리고 기계적 품질계수(Q)는 PZT 단일상(80)보다 상당히 작은 1.5이었고, 1-3 압전복합변환자의 축상 분해능이 크게 향상되었음을 알 수 있었다.