The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Electromagnetic Vibration Transducer Using Silicon Elastic Body For Implantable Middle Ear Hearing Aid Applications

이식형 중이 보청기에 적용 가능한 Si 탄성체로 구현된 전자기 진동 트랜스듀서

  • 이기찬 (경북대 대학원 전기공학과) ;
  • 이세규 (경북대 대학원 전기공학과) ;
  • 박세광 (경북대 전자전기공학부) ;
  • 조진호 (경북대 전자전기공학부) ;
  • 이상흔 (경북대 의과대학 이비인후과)
  • Published : 2000.10.01
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Abstract

This paper presents the design and fabrication of micro electromagnetic vibration silicon elastic body characterized with small size, high efficiency and selective frequency bandwidth for Bio-MENS applications, such as implantable middle ear hearing aid. The presented electromagnetic vibration transducer that composed of wounded coil, permanent magnet and 4-beam cross type elastic body is fabricated by using of micromachining technology. The fabricated transducer has experimental characteristics, that is 5 nm/mA of an energy trasfer rate at the frequency range of 100∼2800 Hz. It has a size of $2{\times}2{\times}2.5\;mm^3$.

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References

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