Journal of the Institute of Electronics Engineers of Korea TE (대한전자공학회논문지TE)

The Institute of Electronics and Information Engineers (대한전자공학회)
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The Effect on Acoustic Band Characteristics of ZnO Piezoelectric Transducer according to Thickness of Counter Electrode Layers

하부전극층의 두께가 ZnO 압전변환기의 음향대역특성에 미치는 영향

  • Park, Gi-Yub (Group-Dept. of Electrical and Electronics, Pusan College of Information Technology) ;
  • Lee, Jong-Deok (Dept. of Electrical and Electronics Engineering, Seonam Univ.) ;
  • Park, Soon-Tae (Group-Dept. of Electrical and Electronics, Pusan College of Information Technology)
  • 박기엽 (釜山情報大學 電氣電子系列) ;
  • 이종덕 (西南大學校 電氣電子工學部) ;
  • 박순태 (釜山情報大學 電氣電子系列)
  • Published : 2000.03.01
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Abstract

In this paper, piezoelectric transducer was theoretically analyzed to fabricate high frequency piezoelectric transducer with broadband characteristics. Piezoelectric transducer have been fabricated with 3.825${\mu}m$ ZnO film on Pt/Sapphire(0001), and its appilicability of transducer was confirmed with analyzing theoretical and experimental frequency characteristic. The resonance frequency was detected at the frequency of 827.47MHz corresponding to the half-wavelength frequency of ZnO thin film. Insertion loss was almost -50dB. The minimum insertion loss agrees with simulation analysis.

본 논문에서는 광대역 특성을 가진 고주파 압전 변환기를 이론적으로 고찰하였고, 압전변환기를 제작하여 이론값과 실험값을 비교, 분석하여 그 응용가능성을 확인하였다. ZnO(3.825${\mu}m$/Pt/Sapphire(0001)구조의 압전변환기의 공진주파수는 827.47MHz로서 압전체의 반파장주파수에서 공진이 일어남을 알 수 있었다. 또한, 삽입손실은 약 -50dB이었고, 최소의 삽입손실은 이론적인 분석과 잘 일치하였다.

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