Journal of Korean Vacuum Science & Technology
- Volume 4 Issue 3
- /
- Pages.81-85
- /
- 2000
- /
- 1226-6167(pISSN)
Composition and interface quality control of AlGaN/GaN heterostructure and their 2DEG transport properties
- Kee, Bong (School of Materials Science and Engineering, Seoul National University) ;
- Kim, H.J. (School of Materials Science and Engineering, Seoul National University) ;
- Na, H.S. (School of Materials Science and Engineering, Seoul National University) ;
- Kwon, S.Y. (School of Materials Science and Engineering, Seoul National University) ;
- Lim, S.K. (School of Materials Science and Engineering, Seoul National Universi) ;
- Yoon, Eui-Joon (School of Materials Science and Engineering, Seoul National University)
- Published : 2000.10.01
Abstract
The effects of
Keywords