Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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A Study on the Fatigue and Data Retention Characteristics of Single Grained PZT Thin Films

단결정립 PZT 박막의 피로 및 정보 유지 특성에 관한 연구

  • Lee, Jang-Sik (School of Materials Science and Engineering, Seoul National School) ;
  • Ju, Seung-Gi (School of Materials Science and Engineering, Seoul National School)
  • 이장식 (서울대학교 재료공학부) ;
  • 주승기 (서울대학교 재료공학부)
  • Published : 2000.05.01
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Abstract

Fatigue and data retention characteristics of the Pt/PZT/Pt structure using single grain PZT thin films by PZT seeding method were investigated. In case of fatigue, there is no loss in switched polarization up to 2$\times$10$^{11}$ cycles using 1MHz square wave form at $\pm$10V and no data loss after 30000sec of memory retention at room temperature. From the activation energy measured at high temperatures, the time required 20% loss in remanent polarization is estimated to be 6.6$\times$10$^{7}$ years at room temperature.

PZT seed에 의해 형성된 단결정립 PZT 박막을 이용하여 Pt/PZT/Pt 구조에서의 피로(fatigue) 및 정보 유지(data retention) 특성에 관하여 연구하였다. 피로 특성의 경우 1㎒의 주파수에서 ±10V의 square wave를 인가하여 측정한 결과 2×10/sup 11/ cycle 동안 전혀 특성의 변화가 관찰되지 않았으며, 정보 유지 능력의 경우 상온에서 30000초 동안 기억 상태의 변화가 없었으며, 고온에서의 retention 측정으로 계산된 활성화 에너지로부터 구한 상온에서의 20% 잔류분극간 감소를 보이는 시간은 6.6×10/sup 7/ 년이었다.

Keywords

References

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