${29}^Si$ MAS NMR Study on Quantitative Analysis of the Amorphous Phase in a $Si_3N_4$ Powder

  • Fujimori, Hirotaka (Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University) ;
  • Kitahara, Hiromoto (Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University) ;
  • Ioku, Koji (Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University) ;
  • Goto, Seishi (Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University) ;
  • Nakayasu, Tetsuo (Ube Research Laboratory, UBE Industries, Ltd.) ;
  • Yamada, Tetsuo (Ube Research Laboratory, UBE Industries, Ltd.)
  • Published : 2000.06.01

Abstract

NMR study has been used for measuring precise quantity of the amorphous phase in the $Si_3N_4$powder. Care must be taken to allow the $^{29}$Si nuclear spin system to fully relax between pulses in order to make the signals proportional to the number of nuclei in each phase. $^{29}$Si MAS spectrum was decomposed into the three spectra of $\alpha$-, $\beta$-, and amorphous $Si_3N_4$assuming pseudo-Voigt function. Moreover, the Rietveld analysis of the powder X-ray diffraction data was performed to measure quantity of crystalline phases as $\alpha/\beta$ ratio.

Keywords

References

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