한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제13권7호
  • /
  • Pages.612-616
  • /
  • 2000
  • /
  • 1226-7945(pISSN)
  • /
  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

측온저항체 온도센서가 집적화된 발열저항체형 마이크로 유량센서의 제작 및 특성

Fabrication and Characteristics of Hot-Film Type Micro-flowsensors integrated with RTD

  • 정귀상 (동서대학교 정보통신공학부 메카트로닉스공학전공) ;
  • 홍석우 (삼성종합기술원 MEMS Lab)
  • 발행 : 2000.07.01
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초록

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

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참고문헌

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