한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)
- 제13권11호
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- Pages.969-975
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- 2000
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- 1226-7945(pISSN)
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- 2288-3258(eISSN)
집속 아르곤 이온 레이저 빔을 이용한 레이저 유도 직접 구리 패터닝
Laser-Induced Direct Copper Patterning Using Focused $Ar^+$ Laser Beam
- 발행 : 2000.11.01
초록
Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)