한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)
- 제13권10호
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- Pages.859-864
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- 2000
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- 1226-7945(pISSN)
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- 2288-3258(eISSN)
적외선 흡수층 응용을 위한 다층 산화 바나듐 박막의 특성에 관한 연구
A Study for the Characteristics of multi-layer VOx Thin Films for Applying to IR Absorbing Layer
초록
Recently IR detecting devices using MEMS have been actively studied. Microbolometer, one of these devices, detects the change of resistivity as the change of temperature of the device by absorbing IR, IR absorbing materials for microbolometer should have high TCR value and low noise characteristics which depends on resistivity. We fabricated multi-layer VOx thin films to improve the IR detectivity of uncooled IR devices and analyzed IR absorbing characteristics. We fabricated multi-layer VOx thin films by RF reactive sputtering method on SiNx substrate and changed characteristics using the different thickness of V and V
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