한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제17권12호
  • /
  • Pages.145-150
  • /
  • 2000
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

초미세 천공 펀치의 성형에 대한 연구

Study on the Fabrication of Ultrathin Punch

  • 임형준 (한국과학기술원 기계공학과) ;
  • 임영모 (한국과학기술연구원 마이크로시스템연구센터) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과)
  • Im, Hyeong-Jun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Im, Yeong-Mo (Micro System Research Center, Korea Institute of Science and Technology) ;
  • Kim, Su-Hyeon (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Gwak, Yun-Geun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 발행 : 2000.12.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Micro punching is one of general methods to fabricate simple holes such as permanent ink-jet printer nozzles. A thin punch, that is need for micro punching, usually has been obtained by mechanical machining. There are some method to obtain a thin punch from a cylindrical rod, e.g., microgrinding and WEDG (Wire Electro-Discharge Grinding). Inefficiently, only one punch can be obtained from these machining methods. In contrast with these methods, many punches can be fabricated simultaneously by electrochemical process. Electrochemical process has usually aimed to obtain very sharp probe for atomic force microscopy (AFM) or scanning tunneling microscopy (STM), and it has not been considered the whole shape of a probe in spite of good merits. In this paper, an ultrathin punch with a tapered shape and a cylindrical tip is newly fabricated by electrochemical process.

키워드

참고문헌

  1. L. S. Fan, 'IC-processed Electrostatic Micromotors,' Sensors & Actuator, Vol. 20, pp. 41-48, 1989 https://doi.org/10.1016/0250-6874(89)87100-8
  2. Christophe Marques, Yohannes M. Desta, James Rogers, Michael C. Murphy and Kevin Kelly, 'Fabrication of High-Aspect-Ratio Microstructures on Planar and Nonplanar Surfaces Using a Modified LIGA Process,' Journal of Microelectromechanical Systems, Vol. 6, No. 4, pp. 329-335, 1997 https://doi.org/10.1109/84.650130
  3. Y. Yamagata, T. Higuchi, 'Three-Dimensional Micro Fabrication by Precision Cutting Technique,' Jpn. JSPE, Vol. 61, No. 10, pp. 1361-1364, 1995
  4. T. Waida, K. Okano, 'Micro-grinding of Micro-machine Component,' Jpn. JSPE, Vol. 61, No. 10, pp. 1365-1368, 1995
  5. Y. M. Lim and S. H. Kim, 'Diameter control of an extremely thin cylindrical microprobe by electrochemical etching,' Rev. of Sci. Instum., Vol. 71, No. 5, pp. 2166-2168, 2000 https://doi.org/10.1063/1.1150600
  6. P. J. Bryant, H. S. Kim, Y. C. Zheng, and R. Yang, 'Technique for shaping scanning tunneling microscope tips,' Rev. Sci. Instrum., Vol. 58, No. 6, p. 1115, 1987 https://doi.org/10.1063/1.1139618
  7. Mircea Fotino, 'Nanotips by reverse electrochemical etching,' Appl. Phys. Lett., Vol. 60, No. 23, pp. 2935-2937, 1992 https://doi.org/10.1063/1.107468
  8. Mircea Fotino, 'Tip sharpening by normal and reverse electrochemical etching,' Rev. Sci. Instrum., Vol. 64, No. 1, pp. 159-167, 1993 https://doi.org/10.1063/1.1144419
  9. J. A. McGeough, 'Principles of Electrochemical Machining,' Chapman & Hall, 1974
  10. P. I. Ortiz, M. L. Teijelo, M. C. Giordano, 'Electrochemical Behaviour of Tungsten in Alkaline Media : Part I. NaOH Solutions,' J. Electroanal. Chem., 243, pp. 379-391, 1988 https://doi.org/10.1016/0022-0728(88)80042-1