Study on the Fabrication of Ultrathin Punch

초미세 천공 펀치의 성형에 대한 연구

  • Im, Hyeong-Jun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Im, Yeong-Mo (Micro System Research Center, Korea Institute of Science and Technology) ;
  • Kim, Su-Hyeon (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Gwak, Yun-Geun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 임형준 (한국과학기술원 기계공학과) ;
  • 임영모 (한국과학기술연구원 마이크로시스템연구센터) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과)
  • Published : 2000.12.01

Abstract

Micro punching is one of general methods to fabricate simple holes such as permanent ink-jet printer nozzles. A thin punch, that is need for micro punching, usually has been obtained by mechanical machining. There are some method to obtain a thin punch from a cylindrical rod, e.g., microgrinding and WEDG (Wire Electro-Discharge Grinding). Inefficiently, only one punch can be obtained from these machining methods. In contrast with these methods, many punches can be fabricated simultaneously by electrochemical process. Electrochemical process has usually aimed to obtain very sharp probe for atomic force microscopy (AFM) or scanning tunneling microscopy (STM), and it has not been considered the whole shape of a probe in spite of good merits. In this paper, an ultrathin punch with a tapered shape and a cylindrical tip is newly fabricated by electrochemical process.

Keywords

References

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