The Journal of Korean Institute of Electromagnetic Engineering and Science (한국전자파학회논문지)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
권호 표지

Novel K/Ka Bandpass Filters using LIGA Micromachined Process

  • Park, K. Y. (RFIC Research and Education Center & Mission Technolgy Research Center, Kwangwoon Univ.) ;
  • Park, J. Y. (RFIC Research and Education Center & Mission Technolgy Research Center, Kwangwoon Univ.) ;
  • Choi, H. K. (RFIC Research and Education Center & Mission Technolgy Research Center, Kwangwoon Univ.) ;
  • Lee, J.C. (RFIC Research and Education Center & Mission Technolgy Research Center, Kwangwoon Univ.) ;
  • Lee, B. (RFIC Research and Education Center & Mission Technolgy Research Center, Kwangwoon Univ.) ;
  • Kim, J. H. (RFIC Research and Education Center & Mission Technolgy Research Center, Kwangwoon Univ.) ;
  • Kim, N. Y. (RFIC Research and Education Center & Mission Technolgy Research Center, Kwangwoon Univ.) ;
  • Park, J. Y. (Microsystem and RF team, Materials and Devices Laboratory, LG Electronics Institute of Technology, 16 Woomyeon-dong, Seocho-Ku, Seoul 137-140, Korea.) ;
  • Kim, G. H. (Microsystem and RF team, Marerials and Devices Laboratory, LG Electronics Instulute of Technology) ;
  • Kim, D. W. (Microsystem and RF team, Marerials and Devices Laboratory, LG Electronics Instulute of Technology) ;
  • Bu, J. U. (Microsystem and RF team, Marerials and Devices Laboratory, LG Electronics Instulute of Technology) ;
  • Chung, K. W. (Microsystem and RF team, Marerials and Devices Laboratory, LG Electronics Instulute of Technology)
  • Published : 2000.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

New class of three dimensional (3-D) micromachined microwave planar filters at K and Ka-band are presented using LIGA micro-machined process. The K-and Ka-band filters show wide bandpass characteristics of~36% and ~39% with the insertion loss 1.26dB at 19.11GHz and 1.7dB at GHz, respectively. These filters can be applicable in high power MMIC of MIMIC.

Keywords

References

  1. Microelectron. Eng. v.4 Fabrication of microstructures with high-aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastics moulding(LIGA process) E. W. Becker;W. Ehrfeld;P. Hagmann;A. Maner;D. Munchmeyer
  2. Kfk-Bericht Untersuching zur Abformung von galvanoforming Mikrostrukturen mit groβer Strukturnhohe aus elektrisch leitfahigen und isolierenden Kunstsoffen M. Harmening;W. Ehrfeld
  3. Proc. SPIE-Int. Soc. Opt. Eng. v.2194 Micromechanics for actuators via deep X-ray lithography H. Guckel;K. J. Skrobis;T. R. Christenson;J. Klein
  4. IEEE Trans. on Indust. Elec. v.42 The LIGA technique and its potential for microsystem- a survey W. Bacher;W. Menz;J.Mohr
  5. IEEE Trans. Microwave Theory Tech. v.MTT-13 The numerical solution of some importing transmission-line problems H. E. Green
  6. Microwave Engineering D. M. Pozar
  7. Foundations for Microstrip Circuit Design T. Edwards
  8. Jmicro Technology Product Information