Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Effects of Post-Annealing for the (Ba, Sr)$TiO_3$ Thin Films Prepared by PLD

PLD법으로 제작된 (Ba, Sr) $TiO_3$ 박막의 후열처리에 따른 특성 변화

  • 김성구 (연세대학교 전기·컴퓨터공학과) ;
  • 주학림 (연세대학교 전기·컴퓨터공학과)
  • Published : 2000.01.01
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Abstract

Structural and electrical properties of (Ba, Sr)TiO\ulcorner (BST) thin films prepared by pulsed laser depositon were investigated to verify the influences of post-annealing in oxygen ambient. Increase of post-anneal-ing time in oxygen ambient resulted in not only grain growth but also improvement of crystallinity of BST films. Although the post-annealing in oxygen ambient resulted in the increase of surface roughness, it assisted the dielectric constant increase by eliminating oxygen vacancies. The electrical property enhancement including high dielectric constant and low leakage current density was associated with introducing high pressure of oxygen during the post-annealing.

Keywords

References

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