Journal of the Korean Ceramic Society (한국세라믹학회지)
- Volume 37 Issue 2
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- Pages.117-121
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- 2000
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- 1229-7801(pISSN)
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- 2234-0491(eISSN)
Fabrication of Er-doped Sodium Borosilicate Glass Films Using Aerosol Flame Deposition Method
Aerosol Flame Deposition법을 이용한 Er-doped Sodium Borosilicate 유리박막 제작에 관한 연구
Abstract
Er-doped sodiumborosilicate glass films for waveguides amplifier were fabricated by Aerosol Flame Deposition(AFD) method. Al2O3 was added to sodium borosilicate glass films to suppress the formation of crystalline phase and control the refractive index. the formation of crystalline phase was suppressed above Al2O3 of 6 wt%. As the amount of Al2O3 increased from 2 to 12 wt% the refractive index of glass films increased lineary from 1.4595 up to 1.4710. After the core of 77SiO2-15B2O3-8Na2O+6 wt%Al2O3+8wt%Er2O3 was coated on the buffer layer of 77SiO2-15B2O3-8Na2O+6 wt%Al2O3, the core was etched by reactive ion etching. The absorption spectrum of 3 cm waveguide amplifier showed two peaks of 1530 and 1550 nm.
Keywords
- Aerosol flame deposition(AFD) method;
- Sodium borosilicate glass films;
- Reactive ion etching;
- Absorption spectrum