Journal of Microbiology and Biotechnology

The Korean Society for Microbiology and Biotechnology (한국미생물·생명공학회)
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Isolation and Characterization of Biofouling Bacteria in Ultra-high Purity Water Used in the Semiconductor Manufacturing Process

  • Kim, In-Seop (Laboratory of Fermentation and Biotechnology, School of Biological Sciences, Seoul National University) ;
  • Lee, Kye-Joon (GreenCross PD Corp.)
  • Published : 2000.08.01
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Abstract

Bacteria were isolated and identified from an advanced high-purity water system that supplies ultra-high purity water (UHPW) for 16-megabyte DRAM semiconductor manufacturing. Scanning electron microscopic and microbiological observations revealed that the primary source of the bacteria isolated from the UHPW was detached cells from biofilms developed on the pipe wall through which the UHPW, a man-made and extremely nutrient poor environment, was passing. About 63-65% of the bacteria isolated from the UHPW and the pipe wall were Gram-positive, whereas only 10% of the bacteria isolated from the feed water were Gram-positive. The of Gram-positive bacteria and seven genera of Gram-negative bacteria. Strains of the UHPW bacteria effectively adhered to and formed a biofilm on the surface of polyvinyl chloride (PVC) pipe.

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