Journal of Sensor Science and Technology (센서학회지)
- Volume 9 Issue 3
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- Pages.242-247
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- 2000
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Crystalline structures and electrical properties of $Pb[(Zr,Sn)Ti]NbO_3$ Thin Films deposited using RF Magnetron Sputtering Method
RF 마그네트론 스퍼터링 방법으로 제작된 $Pb[(Zr,Sn)Ti]NbO_3$ 박막의 결정구조와 전기적 특성
- Choi, Woo-Chang (Dept. of Electronic Eng., Pukyong National University) ;
- Choi, Yong-Jung (Kornic System Corporation) ;
- Choi, Hyek-Hwan (Dept. of Electronic Eng., Pukyong National University) ;
- Lee, Myoung-Kyo (Dept. of Electronic Eng., Pukyong National University) ;
- Kwon, Tae-Ha (Dept. of Electronic Eng., Pukyong National University)
- Published : 2000.05.31
Abstract
10 mole%의 과잉 PbO가 첨가된 타겟을 이용하여
Keywords