한국응용과학기술학회지 (Journal of the Korean Applied Science and Technology)
- 제16권1호
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- Pages.105-115
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- 1999
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- 1225-9098(pISSN)
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- 2288-1069(eISSN)
DOI QR Code
접촉공정에서 건식각 특성
The Dry Etching Characteristics in Contact Process
- Lee, Chang-Weon (Dept. of Chem. Eng., Chungbuk National Univ.) ;
- Kim, Jae-Jeong (Dept. of Chem. Eng., Chungbuk National Univ.) ;
- Kim, Dae-Su (Advanced Tech. Development Center, LG Semicon Co., Ltd.) ;
- Lee, Jong-Dae (Advanced Tech. Development Center, LG Semicon Co., Ltd.)
- 발행 : 1999.03.31
초록
P-type의 단결정 실리콘 위에
키워드