동력기계공학회지 (Journal of Power System Engineering)
- 제3권4호
- /
- Pages.57-62
- /
- 1999
- /
- 2713-8429(pISSN)
- /
- 2713-8437(eISSN)
턴널링 전류효과를 이용한 마이크로가속도 센서의 축전기부 해석
Analysis in Capacitor of Microaccelerometer Sensor Using Tunnelling Current Effect
초록
The microaccelerometer using a tunnelling current effect concept has the potential of high performance, although it requires slightly complex signal-processing circuit for servo-system. The paddle of micro accelerometer is pulled to have the gap width of about 2nm which almost allows the flow tunnelling current. This paper demonstrates at capacitor of microaccelerometer the use of the coupled thermo-electric analysis for voltage, current, heat flux and Joule heating then tunnelling current flows. Two electrodes are applied to the microaccelerometer producing a unform difference of temperature gradient and electric potential between the paddle and the substrate.
키워드