한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제16권7호
- /
- Pages.85-93
- /
- 1999
- /
- 1225-9071(pISSN)
- /
- 2287-8769(eISSN)
GUI를 이용한 슬라이싱 머신의 자동화 알고리즘 개발
A Development of the Algorithms for Automation of Slicing Machine with GUI Interface
- 발행 : 1999.01.01
초록
In this study, PC-based slicing machine and driving software were constructed for the purpose of automation of semi-conductor cutting process. The biggest feature of software is variation of parameter and include data base, signal monitoring, error report, corresponding action or automatic motion planing. Parameters were drawn and algorithms were developed to make software by GUI interface. The cutting experiment was done for sampled wafer to see the effectiveness of the soft automation. From the experimented and implemented results, it is shown that parameters for automation of slicing process could be drawn, then its algorithms constructed. It could be considered what is the merit of this slicing machine by comparing the PC-based and the NC-based.
키워드