전자공학회논문지D (Journal of the Korean Institute of Telematics and Electronics D)

대한전자공학회 (The Institute of Electronics and Information Engineers)
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박막형 크로멜-알루멜 다중접합 열전변환기

Thin Film Chromel-Alumel Multjunction Thermal Converter

  • 정인식 (慶北大學校 電子電氣工學部) ;
  • 김진섭 (仁濟大學校 電子情報通信工學部) ;
  • 이정희 (慶北大學校 電子電氣工學部) ;
  • 이종현 (慶北大學校 電子電氣工學部) ;
  • 신장규 (慶北大學校 電子電氣工學部) ;
  • 박세일 (韓國標準科學硏究阮 電磁氣硏究部) ;
  • 권성원 (韓國標準科學硏究阮 電磁氣硏究部)
  • Jung, In-Sik (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Kim, Jin-Sup (School of Electronic and Telecommunication Engineering, Inje University) ;
  • Lee, Jung-Hee (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Lee, Jong-Hyun (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Shin, Jang-Kyoo (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Park, Se-Il (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Kwon, Sung-Won (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science)
  • 발행 : 1999.09.01
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초록

박막형 다중접합 열전변환기의 시간에 따른 출력 전압 변화를 감소시키기 위해 벌크의 저항온도계수가 매우 적은 EVANOHM-S 합금을 박막 히터재료로 사용하였고, 또한 Seebeck 계수차이가 비교적 작은 크로멜-알루멜 열전쌍을 박막 열전퇴(thermopile)의 열전요소로 하였다. EVANOHM-S 박막 히터의 저항온도계수는 약 $1.4 {\times} 10^4/^{\circ}C$ 였고, 크로멜-알루멜 박막 열전쌍의 Seebeck 계수차이는 약 $38 {\mu}V/K$였다. 열전변환기의 출력 전압 변화는 공기중에서 처음 120초 동안 약 0.06%였고, 약 5분간이상 히터의 예열후 출력전압 변화는 현저히 감소하였다. 10 Hz ~ 10 kHz의 주파수 범위에서 열전변환기의 교류-직류 전압 및 전류 변환 오차범위는 각각 ${\pm}$1.6 ppm 및 ${\pm}$0.7 ppm이었고, 10Hz 이하 또는 10 kHz 이상의 주파수에서는 교류-직류 변환오차가 크게 증가하였다.

For the purpose of reducing the output voltage fluctuation of thin film multijunction thermal converter, EVANOHM alloy-S and chromel-alumel thermocouple were used as a thin film heater material and as a thermoelement of thrmopile, respectively. The temperature coefficient of the resistance of thin film EVANOHM alloy-S heater was about $1.4 {\times} 10^4/^{\circ}C$, which is very small compared to other materials, and thin film chromel-alumel thermocouple showed relatively small difference of the Seebeck coefficients about $38 {\mu}V/K$. The output voltage fluctuation of the thermal converter was about 0.06% for the initial 120 seconds in air and decreased considerably after preheating for 5 minutes or more. The respective AC-DC voltage and current transfer error ranges of the thermal converter were about ${\pm}$1.6 ppm and ${\pm}$0.7 ppm in the frequency range from 10Hz to 10 kHz and increased remarkably below 10 Hz or above 10 kHz.

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