Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 32 Issue 4
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- Pages.513-520
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- 1999
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
A study on the effects of variously configured magnets on the characteristics of inductively coupled plasma
자장의 배열 및 형태가 유도결합형 플라즈마에 미치는 효과에 관한 연구
Abstract
In this study, we investigated the effects of variously configured magnets on the characteristics of the plasmas to enhance plasma uniformity and density of an inductively coupled plasma source. As the magnets, Helmholtz type axial electromagnets and various multi-dipole magnets types around the chamber wall were used. To characterize the plasma as a function of the combination of the magnets and magnetic field strengths, ion density, electron temperature, and plasma potential were measured using an electrostatic probe along the chamber diameter for Ar plasmas. The measured maximum ion densities were
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