Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 32 Issue 3
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- Pages.461-466
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- 1999
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
DIAMOND-LIKE CARBON FILMS FOR ANTIREFLECTION COATINGS OF GERMANIUM INFRATED OPTICAL LENSES
- Kim, Seong-Young (Advanced Consumer Products R&D Center, KITECH) ;
- Lee, Sang-Hyun (Depart. of Metallurgy and Materials Science, Hanyang University) ;
- Lee, Jai-Sung (Depart. of Metallurgy and Materials Science, Hanyang University)
- Published : 1999.06.01
Abstract
Diamond-like carbon(DLC) films were directly deposited onto germanium(Ge) witness pieces and lenses by a capacitively coupled 13.56 MHz RF glow discharge plasma with