Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 32 Issue 3
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- Pages.235-238
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- 1999
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
ANALYSIS OF THE ANODIC OXIDATION OF SINGLE CRYSTALLINE SILICON IN ETHYLEN GLYCOL SOLUTION
- Yuga, Masamitsu (Graduate School of Science and Engineering, Ibaraki University) ;
- Takeuchi, Manabu (Department of Electrical and Electronic Engineering, Ibaraki University)
- Published : 1999.06.01
Abstract
Silicon dioxide films were prepared by anodizing silicon wafers in an ethylene
Keywords
- Anodic Oxidation;
- Silicon Wafers;
- Ethylene Glycol;
- X-ray Photoelectron Spectroscopy;
- Depth Profile of Oxide Film