한국안전학회지 (Journal of the Korean Society of Safety)
- 제14권3호
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- Pages.93-100
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- 1999
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- 1738-3803(pISSN)
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- 2383-9953(eISSN)
방전 플라스마에 의한 CFC-12($CCl_2F_2$ )의 분해
Decomposition of CFC-12($CCl_2F_2$ ) by Discharge Plasma
초록
Decomposition efficiency, power consumption, and applied voltage of CFC(Chlorofluorocatbon) were investigated by SPCP(surface induced discharge plasma chemical processing) reactor to obtain optimum process variables and maximum decomposition efficiencies. Decomposition efficiency of CFC-12 with various electric frequencies(5~50kHz). flow rates (100~1,000mL/min), initial concentrations(100~1,000ppm), electrode materials(W, Cu, Al). electrode thickness(1, 2, 3mm) and reference gases(
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