Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)
- Volume 8 Issue 3
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- Pages.9-14
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- 1999
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- 2508-5093(pISSN)
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- 2508-5107(eISSN)
The Design and Control Super-Precision Coarse and Coarse and Fine Positioning Apparatus
초정밀 조미동 위치결정기구의 설계 및 제어
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