Construction of Knowledge Base for Fault Tracking Expert System in Semiconductor Production Line

반도체 생산 라인에서의 이탈 처리 추적 전문가 시스템의 지식베이스 구축

  • 김형종 (성균관대학교 전기전자 및 컴퓨터공학부) ;
  • 조대호 (성균관대학교 전기전자 및 컴퓨터공학부) ;
  • 이칠기 (성균관대학교 전기전자 및 컴퓨터공학부) ;
  • 김훈모 (성균관대학교 기계공학부) ;
  • 노용한 (성균관대학교 전기전자 및 컴퓨터공학부)
  • Published : 1999.01.01

Abstract

Objective of the research is to put the vast and complex fault tracking knowledge of human experts in semiconductor production line into the knowledge base of computer system. We mined the fault tracking knowledge of domain experts(engineers of production line) for the construction of knowledge base of the expert system. Object oriented fact models which increase the extensibility and reusability have been built. The rules are designed to perform the fault diagnosis of the items in production device. We have exploited the evidence accumulation method to assign check priority in rules. The major contribution is in the overall design and implementation of the nile base and related facts of the expert system in object oriented paradigm for the application of the system in fault diagnosis in semiconductor production line.

Keywords

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