Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Analysis of the Electron Drift Velocity and Characteristics Energy in $SiH_4$ Plasma gas by Electron Swarm method

전자 Swarm법에 의한 $SiH_4$ 플라즈마의 전자이동속도 및 특성에너지 해석

  • 이형윤 (동국대학교 공대 전기공학과) ;
  • 백승권 (인제대학교 공대 전자공학과) ;
  • 하성철 (동국대학교 공대 전기공학과)
  • Published : 1999.01.01
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Abstract

This paper describes the electron transport characteristics in $SiH_4$ gas calculated for the range of E/n:0.5~300(Td) and Pressure:0.5, 1, 2.5(Torr) by the Monte carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the reported results. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal and transverse diffusion coefficients, the electron ionization coefficients, characteristics energy and the electron energy distribution function. The electron energy distributions function has been analysed in $SiH_4$ at E/N: 30, 50(Td)for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Monte carlo simulation and Boltzmann equation have been compared with experimental data by ohmori ad Pollock.

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References

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