Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 8 Issue 4B
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- Pages.519-523
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- 1999
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- 1225-8822(pISSN)
Epitaxial thickness during low-temperature Si(001) growth: effect of substrate vicinality
저온 Si(001) 저온 성장중 에피텍시 두께: 기판 vicinality의 영향
- Lee, N.-E. (Department of Materials Engineering, Sungkyunkwan University)
- 이내응 (성균관대학교 재료공학과)
- Published : 1999.12.01
Abstract
Epitaxial thickness
Keywords