High vacuum packaging and vacuum evaluation for field emission display

A 3.12" FED panel was packaged successfully using the anode plate on which phosphors and black matrix were coated and cathode plate containing emitter arrays. The vacuum level of the panel was investigated during panel evacuation, tip-off and getter activation process. The packaged panel exhibited vacuum level below 2${\times}$10-6 Torr. Similar experiments were carried out for 10" panel made of bare plates. In addition, the vacuum level of two panels was compared continuously after tip off process; one with the getter and the other without it.