Ion Implantation으로 Ca를 첨가된 단결정 $Al_2$O$_3$의 Crack-Like Pore의 Healing 거동-III: Stability of Crack-Like Pore

Effects of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity $Al_2$O$_3$ Using Micro-Lithographic Technique-III: Stability of Crack-Like Pore

  • 발행 : 1999.09.01

초록

The inner crack-like pore with controlled amount of Ca impurity in the high purity alumina single crystal sapphire had been created by micro-fabrication technique which includes ion implanation photo-lithography Ar ion milling and hot press technique. The crack-like pores in two-hour hot pressed specimen were extremely stable even after heat treating at 1,80$0^{\circ}C$ for 5 hours almost no healing was observed. But the crack-like pores in one-hour hot pressed specimen at 1,30$0^{\circ}C$ were healed by heat treatment and the amount of healing was increased with the heat treatment time and temperature and the amount of Ca addition. The edges of crack-like pore parallel to <1100> direction in (001) basal plane were stable but the edges normal to this direction in (00101) plane <1120> direction were unstable to facetting This means that the surface energy of alumina along the <1100> direction in (0001) basal plane in much lower than <1120> direction.

키워드

참고문헌

  1. 요업학회지 v.34 no.8 Ion Implantation으로 Ca를 첨가한 단결정 Al₂O₃의 Crack-like Pore 의 Healing 거동-I. Crack-like Pore의 형성과 Morphological Evolution 김배연
  2. Ceram.Trans. v.7 Impurities in Ceramics : Processing and Effects on Properties;Sintering of Advanced Ceramics P.A. Morris;C.A. Handwerker(ed.);J.E. Blendell(ed.);W.A. Kaysser(ed.)
  3. J. Am. Ceram. Soc. v.75 no.9 High Temperature Healing of Cracklike flaws in Mg- and Ca-Ion Implanted Sapphire J.D. Powers;A.M. Glaeser
  4. J. Am. Ceram. Soc. v.73 no.3 High Temperature Healing of Lithographically Introduced Cracks in Sapphire J.W. Roedel;A.M. Glaeser