Journal of the Optical Society of Korea

  • 제3권2호
  • /
  • Pages.35-40
  • /
  • 1999
  • /
  • 1226-4776(pISSN)
  • /
  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
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Self-Compensation of PZT Errors in White Light Scanning Interferometry

  • Kang, Min-Gu (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Lee, Sang-Yoon (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Seong-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 투고 : 1999.02.23
  • 발행 : 1999.09.01
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초록

One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT(piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 ${\mu}{\textrm}{m}$.

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참고문헌

  1. K. Creath, Proc. Fringe '97, 52 (1997)
  2. S. Kim, S. Jung, Precision Engineering 16, 49 (1994) https://doi.org/10.1016/0141-6359(94)90018-3
  3. M. Kanai, W. Gao, I. Ogura, S. Kiyono, Proc. of the ASPE, 414 (1997)
  4. B. Danielson and C. Boisrobert, Appl. Opt. 30, 2975 (1991) https://doi.org/10.1364/AO.30.002975
  5. M. Born and E. Wolf, Principles of Optics (Pergamon Press, Sixth ed., 1985) p. 316
  6. S. Chim and G. Kino, Appl. Opt. 31, 2550 (1992) https://doi.org/10.1364/AO.31.002550
  7. D. Malacara, Optical Shop Testing (Wiley, New York, 2nd ed., 1992) Chapter 14

피인용 문헌

  1. Roughness Measurement Performance Obtained with Optical Interferometry and Stylus Method vol.10, pp.1, 2006, https://doi.org/10.3807/JOSK.2006.10.1.048
  2. Calibration and verification of areal surface texture measuring instruments vol.64, pp.2, 2015, https://doi.org/10.1016/j.cirp.2015.05.010
  3. Development of aspheric surface profilometry using curvature method vol.16, pp.9, 2015, https://doi.org/10.1007/s12541-015-0255-2