Robust controller design for RTP system using structured uncertainty approach

구조적 불확실성 접근을 이용한 RTP 시스템의 견실제어기 설계

  • 이상경 (두원공과대학 컴퓨터응용제어과) ;
  • 김종해 (경북대학교 센서기술연구소) ;
  • 김해근 (전자통신연구소 차세대 교환 전송실) ;
  • 박홍배 (경북대학교 전기전자공학부)
  • Published : 1999.08.01

Abstract

In this paper, we propose a robust controller design of RTP(Rapid Thermal Processing) system using structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a $\mu$ controller using curve fitting method against structured uncertainty. Also the reduction method should be requried because of the difficulty of implementaion with the obtained high order controller. We dal with robust stability and performance of RTP system by the design of $\mu$ controller for original model and Schur balanced reduced model. Finally the simulation results are proposed to show the validity of the proposed method.

Keywords

References

  1. IEEE Trans. Automatic control v.34 no.8 Controller reduction: concept and approaches B. D. O. Anderson;Y. Liu
  2. Feedback Control Theory J. C. Doyle;B. A. Francis;A. R. Tannenbaum
  3. Proc. of ACC RTP multivariable temperature controller development C. F. Elia
  4. Proc. IEEE CDC Finite time tracking with actuator saturation: application to RTP temperature trajectory following A. Emami-Naeini;M. G. Kabuli;R. L. Kosut
  5. Syst. & Contr. Lett. v.11 State-space formula for all stabilizing controllers that satisfy an $H{\infty}$ norm bound and relations to risk sensitivity K. Glover;J. C. Doyle
  6. Reduced Thermal Proc. for ULSI Rapid thermal annealing-theory and practice C. Hill;S. Jones;D. Boys;R. A. Levy(ed.)
  7. J. Appl. Phys. v.40 Temperature distribution and stress in circular wafers in a row during radiative cooling S. M. Hu
  8. Proc. IEEE CDC Improving static performance robustness of process M. G. Kabuli;L. Kosut
  9. IEEE Trans. Semicond. Manufact. v.1 no.3 Thermal and stress analysis of semiconductor wafers in a rapid thermal processing oven H. A. Lord
  10. Robust Controller Design using Normalized Coprime Factor Plant Descriptions D. McFarlane;K. Glover
  11. Ph. D. Dissert., Stanford Univ. Wafer temperature control in rapid thermal processing S. A. Norman
  12. Proc. IEEE CDC Hankel model reduction without balancing-a descriptor approach M. G. Safonov;R. Y. Chiang;D. J. N. Limebeer
  13. Proc. of ACC A Schur method for balanced model reduction M. G. Safonov;R. Y. Chiang
  14. Automatica v.29 no.1 The complex structured singular value A. Packard;J. Doyle
  15. Proc. IEEE Conf. Decision and Control Structured uncertainty in control system design J. C. Doyle
  16. IEE Proceedings v.129 no.6 Analysis of feedback systems with structured uncertainties J. C. Doyle
  17. 대한전자공학회 논문지-S v.35 no.6 하중 혼합감도함수를 이용한 RTP 시스템의 $H^{\infty}$ 제어기 설계 이상경;김종해;오도창;박홍배