유한요소법을 이용한 스파이럴 박막인덕터의 특성해석

Characteristic Analysis of Spiral Type Thin-Film Inductor Using Finite Element Method

  • 하경호 (창원대 전기공학과) ;
  • 홍정표 (창원대 전기공학과) ;
  • 송재성 (한국전기연구소 신소재응용연구구룹) ;
  • 민복기 (한국전기연구소 신소재응용연구구룹) ;
  • 김현식 (한국전기연구소 신소재응용연구구룹)
  • 발행 : 1999.11.01

초록

The spiral type thin-film inductor performed in high frequency at 2-5[MHz] range is analyzed by 2-dimensional Finite Element Method(2D FEM). The features of micro thin-film inductor have complicated electromagnetic phenomenon such as skin effect, proximity effect and magnetic saturation. To develope miniatured magnetic device considering these features, it is important to predict the property of the thin film inductor according to design parameter. In this paper, we present the 2D FEM analysis for the spiral type thin film inductor. The characteristics of inductor from point of view of inductance, resistance and quality factor are studied according to design parameter and various pattern construction.

키워드

참고문헌

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