센서학회지 (Journal of Sensor Science and Technology)
- 제8권3호
- /
- Pages.274-282
- /
- 1999
- /
- 1225-5475(pISSN)
- /
- 2093-7563(eISSN)
ZnO:In 박막 $NH_3$ 가스센서의 제작 및 특성
Fabrication and Characteristics of ZnO:In Thin Film $NH_3$ Gas Sensor
- Kim, Jin-Hae (Dept. Electronic Materials Eng. and Research Center for Aircraft Parts Technology, Gyeongsang National University) ;
- Jun, Choon-Bae (Dept. of Electronic Eng., Yonam College of Eng.) ;
- Park, Ki-Cheol (Dept. Electronic Materials Eng. and Research Center for Aircraft Parts Technology, Gyeongsang National University)
- 발행 : 1999.05.31
초록
암모니아가스에 민감한 In이 도핑된 ZnO(ZnO:In) 박막을 In 박막(
The In doped ZnO(ZnO:In)thin films sensitive to
키워드