Journal of Korean Ophthalmic Optics Society (한국안광학회지)

The Korean Ophthalmic Optics Society (한국안광학회)
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Chacterization and Preparation of SiO2-TiO2-AgO thin Films by the Chemical Solution Process

용액법에 의한 SiO2-TiO2-AgO계 박막의 제조 및 특성에 관한 연구

  • Kim, Sangmoon (Department of Ophthalmic Optics, Kwangju Health College) ;
  • Shim, Moon-Sik (Department of Ophthalmic Optics, Kwangju Health College) ;
  • Lim, Yongmu (Department of Ophthalmic Optics, Kwangju Health College) ;
  • Hwang, Kyuseog (Department of Ceramic Engineering, Chonnam National University)
  • 김상문 (광주보건대학 안경광학과) ;
  • 심문식 (광주보건대학 안경광학과) ;
  • 임용무 (광주보건대학 안경광학과) ;
  • 황규석 (전남대학교 무기재료공학과)
  • Received : 1998.11.30
  • Published : 1998.12.31
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Abstract

Coating films of $SiO_2-TiO_2-AgO$ have been prepared on soda-lime-silica slide glasses and single crystal silicon wafer by the sol-gel method using a spin-coating technique. Commercially available tetraethyl orthosilicate, titanium trichloride, and silver-nitrates were used as starting materials. The heat treatment temperature of this coating films was $500^{\circ}C$ properly, obtained from TG-DTA result. The films with thickness of 310 nm were prepared by 5 times coating. In the case of l0 mol% AgO, the film showed a crack-free and smooth surface, but the higher Ago content exhibited the more pin hole and the segregated cluster of AgO. The IR absorbance of the films decreased in the range of 400 nm to 700 nm with the increase of annealing temperature. And the reflectance of the coating films decreased and the color was changed light yellow to white yellow with the increase of Ago content.

$SiO_2-TiO_2-AgO$ 코팅박막을 졸-겔법으로 현미경용 슬라이드 유리판과 씰리콘 기판에 제조하였다. 이 박막의 열처리온도는 $500^{\circ}C$가 적절하였으며 5회 반복코팅한 박막의 두께는 310nm였다. AgO가 10mol% 첨가된 박막의 표면은 균일한 구조를 보였으나 첨가량이 많아질수록 박막의 표면에 pin hole과 AgO의 석출에 기인한 cluster를 보였다. 열처리온도의 증가에 따라 IR흡수의 정도가 점차 감소하였고, AgO 첨가량의 증가에 따라 반사율은 점차 감소하였으며 색상은 light yellow에서 무채색 쪽으로 점차 전이하였다.

Keywords

Acknowledgement

Supported by : 광주보건대학