A Study on the Improvement of Accuracy of Surface Measurement in the Phase-Shifting Shadow Moir$\'{e}$ Method

위상이동 그림자 무아레방법을 이용한 형상측정법의 정확도 개선에 관한 연구

In this study, the theory and application of phase-shifting shadow moire topography is focused on the non-contact measurement of object surfaces for practical use in the field of production engineering. Shadow moire topography has been studied during last few decades in the area of the optical physics, and now its mathmatical theory has been established. Generally, in case of the classical shadow moire topography, the sensitivity is a few tenths of millimeter in best cases. Here we tried the application of phase-shifting method to the conventional shadow moire topography. But the reference grating and the deformed grating are mutually dependent because it is impossible to obtain uniform phase shifts on the whole Held. Therefore it is difficult to use a phase-shifting method in shadow moire topography. However, it was shown that constant phase-shifting was able to be measured by moving both the grating and light source. Finally we obtained a better result by using this procedure and applied the phase-shifting shadow moire to three dimensional object measurement.