The Effect of Ion Contribution to the Dielectric Properties of $\beta$-PVDF Thin Film Fabricated by Vapor Deposition Method

진공증착법으로 제조된 $\beta$-PVDF 박막의 유전 특성에 미치는 이온의 영향

  • 박수홍 (인하대학교 공대 전기공학과) ;
  • 김종택 (인하대학교 공대 전기공학과) ;
  • 이덕출 (인하대학교 공대 전기공학과)
  • Published : 1998.11.01

Abstract

In this paper, the dielectric properties of fabricated Polyvinylidene fluoride(PVDF, $PVF_2$) thin film with substrate temperature from 30 to at vapor deposition. The dielectric properties of PVDF thin film had been studied in the frequency range from 10Hz to 4MHz at measuring temperature between 20 and $100^{/circ}C$. The anomalous increasing in dielectric constant and dielectric loss at low frequencies and high temperature was described for PVDF thin film containing ion impurities. In particularly, ion mobility of fabricated PVDF thin film at substrate temperature at $30^{/circ}C$ decrease from $2\times10^{-5}\;to\;3.07$\times10^{-7}cm^2/V.s$ On the other hand, ion density increase abruptly from 1.49\times$$10^{13}$ to $1.5\times$10^{16}$cm^{-3}$ In spite of decreasing of ion mobility, dielectric constants and dielectric loss for PVDF thin film increase rapidly with decreasing frequency and high temperature. It was concluded that the dielectric constants and dielectric loss was related to ion density than to ion mobility at low frequency and high temperatures.

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References

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